A new concept and first development results of a PZT thin film actuator

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 2000, Pages 519-524

  Hoffmann, M ^a   Kuppers H ^a   Schneller, T ^a   Bottger U ^a   Schnakenberg, U ^a   Mokwa, W ^a   Waser, R ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DEPOSITION; HYSTERESIS; MICROACTUATORS; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; STRESSES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

STRESS COMPENSATION; THIN FILM ACTUATOR;

LEAD COMPOUNDS;

EID: 0034472117     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)

1. A value less diffuser/nozzle-based fluid pump
2. Self-excited force sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy
3. Application of gas jet deposition method to piezoelectric thick film miniature actuator
4. Sol-gel derived ferroelectric thin films in silicon micromachining
5. High-brightness projection display systems based on the thin film actuated mirror array (TFAMA)
6. Basic investigations on a piezoelectric bending actuator for micro-electro-mechanical applications
7. Influence of the Pt electrode on the properties of sol-gel PZT-films
8. 3
9. 3, PZT and PLZT thin films
10. 3/Pt ferroelectric capacitors
11. Ferroelectric materials and their applications
12. Electroceramics
13. Keramik
14. 3 thin films
15. Piezoelectric thin films for MEMS
16. 3 thin films with (100), (111), and 'random' crystallographic orientation
17. Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients
18. RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets
19. Which PZT thin film for piezoelectric microactuator applications
20. The tension of metallic films deposited by electrolysis