Magnetron sputtered Ba(1-x)SrxTiO3 thin films

IEEE International Symposium on Applications of Ferroelectrics

Volumn 2, Issue , 2000, Pages 875-878

  Cukauskas, E J ^a   Kirchoefer, S W ^a   Pond, J M ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BARIUM COMPOUNDS; CRYSTAL MICROSTRUCTURE; DIFFRACTOMETERS; FILM GROWTH; GRAIN SIZE AND SHAPE; ION BOMBARDMENT; LATTICE CONSTANTS; MAGNETRON SPUTTERING; MORPHOLOGY; SURFACES; X RAY DIFFRACTION ANALYSIS;

BARIUM STRONTIUM TITANATE; INVERTED CYLINDRICAL MAGNETRON; OFF-AXIS COSPUTTERING;

FERROELECTRIC THIN FILMS;

EID: 0034471928     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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4. 3
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10. CAD models for multilayered substrate interdigital capacitors