Multiple SOI layers by multiple Smart-Cut transfers

IEEE International SOI Conference

Volumn , Issue , 2000, Pages 134-135

  Maleville, C ^a   Barge, T ^a   Ghyselen, B ^a   Auberton, A J ^a   Moriceau, H ^a   Cartier, A M ^a  

^a PARC TECHNOLOGIQUE DES FONTAINES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MICROPROCESSOR CHIPS; SEMICONDUCTING SILICON; SILICA; SILICON CARBIDE; SUBSTRATES;

MONOCRYSTALLINE SILICON;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0034471050     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)