SOI wafer selection for CCD/SOI-CMOS technology

IEEE International SOI Conference

Volumn , Issue , 2000, Pages 136-137

  Suntharalingam, V ^a   Burke, B E ^a   Chen, C K ^a   Cooper, M J ^a   Keast, C L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; ELECTRIC CURRENTS; GATES (TRANSISTOR); IMAGE SENSORS; IMAGING SYSTEMS; RAPID THERMAL ANNEALING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

DARK CURRENTS;

CMOS INTEGRATED CIRCUITS;

EID: 0034470990     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)