Channel waveguide fabrication of organic nonlinear optical crystal, DAST, by Using oxygen RIE

Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics

Volumn 25, Issue 1-4, 2000, Pages 413-418

  Takayama, K ^a   Yoshida, M ^a   Deng, H H ^a   Komatsu, K ^a   Kaino, T ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Channel waveguide; DAST; Organic crystal; Photolithography; RIE

Indexed keywords

CRYSTALS; NONLINEAR OPTICS; OPTICAL WAVEGUIDES; OXYGEN; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

CHANNEL WAVEGUIDE FABRICATION; NONLINEAR OPTICAL (NLO) CRYSTALS;

SALTS;

EID: 0034454258     PISSN: 10587268     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)