Yield implications of wafer edge engineering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4229, Issue , 2000, Pages 70-78

  Harris, Kenneth R ^a   Ang, Boon Yong ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

Edge integration; Wafer edge engineering

Indexed keywords

CONTAMINATION; CRYSTAL DEFECTS; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE;

EDGE INTEGRATION; WAFER EDGE ENGINEERING;

SILICON WAFERS;

EID: 0034453417     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.404862     Document Type: Article

References (2)