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Volumn 623, Issue , 2000, Pages 271-276

Ir-transparent electrically conductive CuAlxOy deposited by reactive magnetron co-sputtering

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; COMPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SPECTROSCOPY; ELECTROOPTICAL EFFECTS; EMISSION SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; INDUCTIVELY COUPLED PLASMA; MAGNETRON SPUTTERING; MOLECULAR STRUCTURE;

EID: 0034448473     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/PROC-623-271     Document Type: Article
Times cited : (2)

References (0)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.