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Volumn 623, Issue , 2000, Pages 271-276
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Ir-transparent electrically conductive CuAlxOy deposited by reactive magnetron co-sputtering
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL MODIFICATION;
COMPOSITION;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTRON ENERGY LOSS SPECTROSCOPY;
ELECTRON SPECTROSCOPY;
ELECTROOPTICAL EFFECTS;
EMISSION SPECTROSCOPY;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HIGH RESOLUTION ELECTRON MICROSCOPY;
INDUCTIVELY COUPLED PLASMA;
MAGNETRON SPUTTERING;
MOLECULAR STRUCTURE;
COPPER ALUMINUM OXIDE;
ELECTROOPTICAL PROPERTIES;
INFRARED TRANSPARENCY;
COPPER COMPOUNDS;
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EID: 0034448473
PISSN: 02729172
EISSN: None
Source Type: Journal
DOI: 10.1557/PROC-623-271 Document Type: Article |
Times cited : (2)
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References (0)
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