The time dependence of point defect behavior near the growth interface in Cz-Si

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4218, Issue , 2000, Pages 19-30

  Park, Bong Mo ^a   Choi, Il Soo ^a  

^a LG Siltron Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; INTERFACES (MATERIALS); POINT DEFECTS; SINGLE CRYSTALS; THERMAL EFFECTS;

SILICON CRYSTALS;

SEMICONDUCTING SILICON;

EID: 0034447765     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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