SCOPUS 정보 검색 플랫폼

Integrated Ferroelectrics

Volumn 31, Issue 1-4, 2000, Pages 149-162

Single-grained PZT thin films for high level fram integration - Fabrication and characterization

(3) Lee, J S a Lee, B I a Joo, S K a

a Seoul National University (South Korea)

Author keywords

PZT; Single grain; Sputtering; Thin film

Indexed keywords

CRYSTALLIZATION; ELECTRIC BREAKDOWN OF LIQUIDS; ELECTRIC PROPERTIES; FILM PREPARATION; GRAIN GROWTH; GRAIN SIZE AND SHAPE; LEAD COMPOUNDS; LEAKAGE CURRENTS; PLATINUM; POLARIZATION; SPUTTERING; SUBSTRATES;

ACCELERATION RETENTION TEST; HIGH LEVEL FRAM INTEGRATION; LEAD ZIRCONIUM TITANATE; REMANENT POLARIZATION; SATURATION POLARIZATION;

THIN FILMS;

EID: 0034447441 PISSN: 10584587 EISSN: None Source Type: Journal
DOI: 10.1080/10584580008215649 Document Type: Conference Paper

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.