Growth of BaTiO3/SrTiO3 superlattices by injection MOCVD

Integrated Ferroelectrics

Volumn 30, Issue 1-4, 2000, Pages 53-59

  Lindner, J ^a,b   Weiss, F ^a   Senateur, J P ^a   Haessler, W ^c   Kobernik G ^c   Oswald, S ^c   Figueras, A ^d   Santiso, J ^d  

^a LABORATOIRE DES MATÉRIAUX ET DU GÉNIE PHYSIQUE   (France)

^b AIXTRON AG   (Germany)

^c IFW DRESDEN   (Germany)

^d INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

Author keywords

BaxSr1 xTiO3; Films; Injection MOCVD; Superlattices; X ray

Indexed keywords

BARIUM TITANATE; EPITAXIAL GROWTH; INTERFACES (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; MULTILAYERS; SEMICONDUCTOR GROWTH; STRONTIUM COMPOUNDS; SURFACE ROUGHNESS; TEMPERATURE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

INTERFACE ROUGHNESS; LIQUID SOURCE DELIVERY TECHNIQUE;

SEMICONDUCTOR SUPERLATTICES;

EID: 0034447279     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580008222253     Document Type: Conference Paper

References (5)