Micro pattern of TiO2 thin film formation by direct synthesis from aqueous solution and transcription of resist pattern

Materials Research Society Symposium - Proceedings

Volumn 623, Issue , 2000, Pages 423-426

  Yao, T ^a   Uchimoto, Y ^a   Yabe, H ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ETHANOL; PERMITTIVITY; PHOTORESISTS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SOLUTIONS; SYNTHESIS (CHEMICAL); TITANIUM DIOXIDE; X RAY DIFFRACTION ANALYSIS;

DIRECT SYNTHESIS FROM AQUEOUS SOLUTION; MICRO PATTERNING;

THIN FILMS;

EID: 0034447207     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-623-423     Document Type: Conference Paper

References (2)