Design, manufacturing, and characterization of high-frequency thickness-shear mode resonators

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2000, Pages 106-112

  Rabe, Jens ^a   Büttgenbach, Stephanus ^a   Zimmermann, Bernd ^b   Hauptmann, Peter ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; ELECTRIC FREQUENCY CONTROL; ELECTRIC IMPEDANCE MEASUREMENT; ETCHING; MECHANICAL PROPERTIES; OPTICAL MICROSCOPY; OPTICAL PROPERTIES; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; THICK FILM DEVICES;

HIGH FREQUENCY RESONATORS; QUARTZ CRYSTAL MICROBALANCES; THICKNESS SHEAR MODE RESONATORS;

CRYSTAL RESONATORS;

EID: 0034446247     PISSN: 01616404     EISSN: None     Source Type: Journal    
DOI: 10.1109/FREQ.2000.887338     Document Type: Article

References (11)

1. Frequency of a quartz microbalance in contact with liquid
2. Verwendung von Schwing-quarzen zur Wägung dünner Schichten und zur Mikrowägung
3. Operation of an ultrasensitive 30-MHz quartz crystal microbalance in liquids
4. New design for QCM sensors in liquids
5. Analysis of compressional-wave influence on thickness-shear-mode resonators in liquids
6. Physical acoustics and properties of solids
7. Etch pits and channels in swept AT- and SC-cut quartz
8. Etch channels in single crystal cultured quartz
9. Etching studies of AT-cut cultured quartz using etchants containing fluoride salts, hydrofluoric acid, and ammonium bifluoride
10. Sensing liquid properties with shear-mode resonator sensors