Manufacture of microelectronic circuitry by Drop-On-Demand dispensing of nano-particle liquid suspensions

Materials Research Society Symposium - Proceedings

Volumn 624, Issue , 2000, Pages 23-28

  Szczech, J B ^a   Megaridis, C M ^a   Gamota, D R ^b   Zhang, J ^b  

^a UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DROP FORMATION; EVAPORATION; INK; INTEGRATED CIRCUIT MANUFACTURE; LIQUIDS; LITHOGRAPHY; METALLIZING; NANOSTRUCTURED MATERIALS; ORGANIC SOLVENTS; RHEOLOGY; SINTERING; SUSPENSIONS (FLUIDS);

CONDUCTIVE INK; DROP ON DEMAND; FINE LINE CIRCUIT INTERCONNECTS; INKJET PRINTING; NANOPARTICLE LIQUID SUSPENSIONS; PIEZOELECTRIC DROPLET GENERATOR; SATELLITE FREE DROPLETS;

MICROELECTRONIC PROCESSING;

EID: 0034445969     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/PROC-624-23     Document Type: Article

References (0)