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Volumn 4, Issue , 2000, Pages 2800-
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A Smart thin-film flow sensors for biomedical applications
a a a a |
Author keywords
Flow sensor; Respiratory monitoring; Thin film sensor
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Indexed keywords
AMORPHOUS MATERIALS;
BIOSENSORS;
FLOWMETERS;
MEMBRANES;
MICROMACHINING;
RESPIRATORY SYSTEM;
THERMISTORS;
THIN FILMS;
MICROMACHINED THIN MEMBRANE;
RESPIRATORY MONITORING;
SMART THIN FILM FLOW SENSOR;
THERMAL FLOW SENSOR;
THIN FILM AMORPHOUS GERMANIUM THERMISTOR;
MEDICAL APPLICATIONS;
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EID: 0034445078
PISSN: 05891019
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (4)
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