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Volumn , Issue , 2000, Pages 134-139
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Microwave switch using MEMS-technology
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Author keywords
[No Author keywords available]
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Indexed keywords
HYBRID INTEGRATED CIRCUITS;
MICROACTUATORS;
MICROPROCESSOR CHIPS;
MICROSENSORS;
MICROWAVE DEVICES;
SWITCHES;
TRANSDUCERS;
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS);
MICROWAVE SWITCHES;
MICROELECTROMECHANICAL DEVICES;
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EID: 0034441746
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (15)
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References (8)
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