Broadband low actuation voltage RF MEM switches

Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Volumn , Issue , 2000, Pages 161-164

  Shen, S C ^a   Caruth, D ^a   Feng, M ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; MASKS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; MULTILAYERS; NATURAL FREQUENCIES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR SWITCHES; SUBSTRATES;

MICROELECTROMECHANICAL SWITCHES; RADIO FREQUENCIES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034441645     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)