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Volumn 1, Issue , 2000, Pages 901-906

Input design for optimal discrete time point-to-point motion of an industrial XY-positioning table

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ITERATIVE METHODS; OPTIMIZATION; OSCILLATIONS; SERVOMOTORS;

EID: 0034439055     PISSN: 01912216     EISSN: None     Source Type: Journal    
DOI: 10.1109/CDC.2000.912887     Document Type: Article
Times cited : (33)

References (6)
  • 6
    • 0004036824 scopus 로고    scopus 로고
    • Motion control of a wafer stage. A design approach for speeding up IC production
    • PhD thesis, Delft University of Technology; ISBN: [90-407-1562-9]
    • (1997)
    • De Roover, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.