Process modeling of the laser induced surface modification of ceramic substrates for thermal and electrical lines in microsystems

Materials Research Society Symposium - Proceedings

Volumn 617, Issue , 2000, Pages J531-J536

  Gruhn, Herbert ^a   Heidinger, Roland ^a   Rohde, Magnus ^a   Rüdiger, Sabine ^a   Schneider, Johannes ^a   Zum Gahr, Karl Heinz ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK INITIATION; FINITE ELEMENT METHOD; LASER APPLICATIONS; SUBSTRATES; THERMAL STRESS;

MICROSYSTEMS;

CERAMIC MATERIALS;

EID: 0034438506     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/PROC-617-J5.3     Document Type: Article

References (5)

1. 3 ceramics by laser-induced surface alloying
2. Marangoni flow and the shapes of laser-melted pools
3. Lasertechnik
4. Laseroberflächenumschmelzen von metallischen und nichtmetallischen Werkstoffen