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Volumn 5, Issue 3-4, 2000, Pages 255-263
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Industrial-scale process control by means of electrostatics probes
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Author keywords
Process homogeneity; Process stability; Rt discharge
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Indexed keywords
CARRIER CONCENTRATION;
ELECTROSTATICS;
PLASMA DENSITY;
PLASTIC FILMS;
PROBES;
PROCESS CONTROL;
ELECTROSTATICS PROBES;
PLASMA POLYMERIZATION;
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EID: 0034435939
PISSN: 10840184
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1011362303242 Document Type: Article |
Times cited : (3)
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References (15)
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