Solar-cell suitable μc-Si films grown by ECR-CVD

Materials Research Society Symposium - Proceedings

Volumn 609, Issue , 2000, Pages

  Birkholz, M ^a   Conrad, E ^a   Lips, K ^a   Selle, B ^a   Sieber, I ^a   Christiansen, S ^a   Fuhs, W ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL IMPURITIES; CRYSTALLIZATION; ELECTRON CYCLOTRON RESONANCE; ELECTRONIC PROPERTIES; FILM GROWTH; FILM PREPARATION; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; PHOTOCONDUCTIVITY; PHOTOSENSITIVITY; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTALLINITY;

THIN FILMS;

EID: 0034431094     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-609-a5.5     Document Type: Conference Paper

References (11)