Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2000, Pages 1491-1498

  Herrmann, Jeffrey W ^a   Conaghan, Brian F ^a   Henn Lecordier, Laurent ^a   Mellacheruvu, Praveen ^a   Nguyen, Manh Quan ^a   Rubloff, Gary W ^a   Shi, Rock Z ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPERATIONS RESEARCH; OPTIMIZATION; PROCESS ENGINEERING; SILICON WAFERS;

WAFER FABRICATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034430743     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)