Design of fly's eye homogenizer for excimer laser micro-machining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4223, Issue , 2000, Pages 40-44

  Zuo, Tiechuan ^a   Chen, Tao ^a   Li, Chengde ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; MICROMACHINING; MICROOPTICS;

HOMOGENIZERS;

EXCIMER LASERS;

EID: 0034430114     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.401749     Document Type: Conference Paper

References (8)