Integrating dynamic fab capacity and automation models for 300 mm semiconductor manufacturing

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2000, Pages 1505-1509

  DeJong, Chad D ^a   Fischbein, Seth A ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; SEMICONDUCTOR DEVICE MODELS;

FABRICATION CAPACITY MODELS; INTEGRATED SEMICONDUCTOR MODELS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0034430093     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)