T-site-trapped molecular hydrogen in a-Si:H

Materials Research Society Symposium - Proceedings

Volumn 609, Issue , 2000, Pages

  Norberg, R E ^a   Leopold, D J ^a   Fedders, P A ^a   Borzi, R ^a   Chan, P H ^a   Herberg, J ^a   Tomic, N ^a  

^a WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; HYDROGEN; NUCLEAR MAGNETIC RESONANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTONS; SEMICONDUCTING FILMS; SPECTRUM ANALYSIS;

HYDROGENATED SILICON;

SILANES;

EID: 0034429794     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-609-a26.2     Document Type: Conference Paper

References (4)