Low temperature laser-doping process using PSG and BSG films for poly-Si TFTs

Materials Research Society Symposium - Proceedings

Volumn 621, Issue , 2000, Pages

  Kim, C H ^a   Jung, S H ^a   Jeon, J H ^a   Han, M K ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; LASER PULSES; LOW TEMPERATURE OPERATIONS; POLYSILICON; SEMICONDUCTING GLASS; SEMICONDUCTOR DOPING;

EXCIMER-LASER-DOPING PROCESS;

THIN FILM TRANSISTORS;

EID: 0034429586     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-621-q8.4.1     Document Type: Conference Paper

References (5)