Productivity modeling of semiconductor manufacturing equipment

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2000, Pages 1423-1427

  Pool, Mark ^a   Bachrach, Robert ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER OPERATING SYSTEMS; COMPUTER SIMULATION; GRAPHICAL USER INTERFACES; MATHEMATICAL MODELS;

COST-MODELING CONCEPTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034429509     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)