High-performance poly-Si TFTs with multiple selectively doped regions in the active layer

Materials Research Society Symposium - Proceedings

Volumn 621, Issue , 2000, Pages

  Lee, M C ^a   Yoo, J S ^a   Park, K C ^a   Jung, S H ^a   Han, M K ^a   Kim, H J ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC FIELD EFFECTS; ION IMPLANTATION; LASER BEAM EFFECTS; LEAKAGE CURRENTS; LIQUID CRYSTAL DISPLAYS; POLYSILICON; SEMICONDUCTOR DOPING;

POLYSILICON THIN FILM TRANSISTORS (TFT); SELECTIVELY DOPED REGIONS;

THIN FILM TRANSISTORS;

EID: 0034428286     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-621-q9.11.1     Document Type: Conference Paper

References (5)