|
|
|
Volumn 2, Issue , 2000, Pages 1436-1442
|
|
Analysis of the instationary behavior of a wafer fab during product mix changes
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
COMPUTER SIMULATION;
MATHEMATICAL MODELS;
PRODUCT DESIGN;
SILICON WAFERS;
SEMICONDUCTOR WAFER FABRICATION;
SEMICONDUCTOR DEVICE MANUFACTURE;
|
|
EID: 0034428151
PISSN: 02750708
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (16)
|
|
References (4)
|
