Simplified model for RMS variation in Pulsed Laser Deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4430, Issue 1, 2000, Pages 241-247

  Marcu, A ^a   Grigoriu, C ^a   Yatsui, K ^b  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Droplets; Eclipse; Laser ablation; Pulsed laser deposition; Shadow mask; Surface roughness; Thin film; YBCO

Indexed keywords

LASER ABLATION; MASKS; SURFACE ROUGHNESS; THIN FILMS;

ECLIPSE; SHADOW MASK;

PULSED LASER DEPOSITION;

EID: 0034425589     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.432847     Document Type: Article

References (8)