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Volumn 50, Issue 3, 2000, Pages 425-432
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Electron and ion mobilities in argon plasma with fluorine as additive
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0034399521
PISSN: 00114626
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1022882811680 Document Type: Article |
Times cited : (3)
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References (8)
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