Polycrystalline silicon thin film transistors fabricated by employing selective self ion-implantation and excimer laser annealing

Journal of the Korean Physical Society

Volumn 37, Issue 6, 2000, Pages 870-872

  Lee, Min Cheol ^a   Jeon, Jae Hong ^a   Jung, Sang Hoon ^a   Han, Min Koo ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034347668     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.37.870     Document Type: Article

References (5)

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