Grazing excidence diffraction versus grazing incidence diffraction for strain/stress evaluation in thin films

Powder Diffraction

Volumn 15, Issue 4, 2000, Pages 211-216

  Njeh, Anouar ^a   Wieder, Thomas ^a   Fuess, Hartmut ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Grazing incidence; Residual stress evaluation; Thin films; X ray diffraction

Indexed keywords

X RAY DIFFRACTION;

GRAZING INCIDENCE; GRAZING INCIDENCE DIFFRACTION; RESIDUAL STRAIN/STRESS; STRESS EVALUATIONS;

THIN FILMS;

EID: 0034344604     PISSN: 08857156     EISSN: 19457413     Source Type: Journal    
DOI: 10.1017/S088571560001109X     Document Type: Article

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