Hydrogen-implantation induced silicon surface layer exfoliation

Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

Volumn 80, Issue 11, 2000, Pages 1921-1931

  Hochbauer T ^a,d   Misra, A ^a   Verda, R ^a   Nastasi, M ^a   Mayer, J W ^b   Zheng, Y ^c   Lau, S S ^c  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d PHILIPPS UNIVERSITY MARBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034334868     PISSN: 13642812     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418630050179654     Document Type: Article

References (25)