Chemical vapor deposition of B12As2 thin films on 6H-SiC

Journal of Electronic Materials

Volumn 29, Issue 11, 2000, Pages 1304-1306

  Wang, R H ^a   Zubia, D ^a   O'Neil, T ^a   Emin, D ^a   Aselage, T ^b   Zhang, W ^b   Hersee, S D ^a  

^a UNIVERSITY OF NEW MEXICO   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRON DIFFRACTION; LATTICE CONSTANTS; POLYCRYSTALLINE MATERIALS; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

LATTICE MISMATCH;

THIN FILMS;

EID: 0034324532     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-000-0129-x     Document Type: Article

References (8)

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