Investigation of the spatial resolution of the light-addressable potentiometric sensor

Sensors and Actuators, A: Physical

Volumn 86, Issue 3, 2000, Pages 187-196

  George, M ^a   Parak, W J ^a   Gerhardt, I ^b   Moritz, W ^b   Kaesen, F ^c   Geiger, H ^c   Eisele, I ^c   Gaub, H E ^a  

^a UNIVERSITY OF MUNICH   (Germany)

^b HUMBOLDT UNIVERSITY   (Germany)

^c Institute of Physics   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; MICROMETERS; OPTICAL RESOLVING POWER; SEMICONDUCTOR DOPING; SILICON WAFERS; SUBSTRATES; WAVE EQUATIONS;

LIGHT-ADDRESSABLE POTENTIOMETRIC SENSORS (LAPS); SURFACE POTENTIAL SENSORS;

POTENTIOMETRIC SENSORS;

EID: 0034324145     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00455-6     Document Type: Article

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