|
Volumn 19, Issue 21, 2000, Pages 1913-1916
|
Structure and electrical properties of RF-sputtering deposited thin ferroelectric Pb(Zr0.52Ti0.48)O3 films
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
COERCIVE FORCE;
FERROELECTRIC MATERIALS;
LEAD COMPOUNDS;
PERMITTIVITY;
POLARIZATION;
REMANENCE;
SPUTTER DEPOSITION;
SUBSTRATES;
THIN FILMS;
LEAD ZIRCONIUM TITANATE;
RADIOFREQUENCY-SPUTTERING;
DIELECTRIC FILMS;
|
EID: 0034323905
PISSN: 02618028
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1006751130581 Document Type: Article |
Times cited : (9)
|
References (14)
|