Direct synthesis of continuous Sm disilicide films by Sm-ion implantation using a metal vapour vacuum arc ion source

Journal of Physics Condensed Matter

Volumn 12, Issue 44, 2000, Pages 9195-9200

  Cheng, X Q ^a   Zhu, H N ^a   Wang, R S ^a   Liu, B X ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; ION IMPLANTATION; ION SOURCES; MORPHOLOGY; SEMICONDUCTING SAMARIUM COMPOUNDS; SILICON WAFERS; SYNTHESIS (CHEMICAL); VACUUM APPLICATIONS;

METAL VAPOR VACUUM ARC ION SOURCES;

SEMICONDUCTING FILMS;

EID: 0034322240     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/12/44/301     Document Type: Article

References (15)

1. Knapp J A and Picraux S T 1986 Appl. Phys. Lett. 48 466
2. Siegal M P, Kaatz F H, Graham W R, Santiago J J and d'Spiegel J V 1989 Appl Surf. Sci. 38 162
3. Duboz J Y, Badoz P A and d'Avitaya F A 1989 Appl. Phys. Lett. 55 84
4. Baglin J E E, d'Heurle F M and Petersson C S 1980 Appl. Phys. Lett. 36 594
5. Thompson R D, Tsaur B Y and Tu K N 1981 Appl. Phys. Lett. 38 535
6. Baglin J E E, d'Heurle F M and Petersson C S 1981 J. Appl. Phys. 52 2841
7. Lau S S, Pai C S, Wu C S, Kuech T F and Liu B X 1982 Appl Phys. Lett. 41 77
8. White A E, Shprt K T, Dynes R C, Garno J P and Gibson J M 1987 Appl. Phys. Lett. 50 95
9. Wu M F, Vantomme A, Hogg S, Pattyn H and Langouche G 1998 Appl Phys. Lett. 72 2412
10. Brown I G, Gavin J E and MacGill R A 1985 Appl. Phys. Lett. 47 1358
11. Zhu D H, Tao K, Pan F and Liu B X 1993 Appl. Phys. Lett. 62 2356
12. Liu B X, Zhu D H, Lu H B, Pan F and Tao K 1994 J. Appl. Phys. 75 3847
13. Zhu D H, Chen Y G and Liu B X 1995 Nucl. Instrum. Methods B 101 394
14. Gao K Y and Liu B X 1997 Nucl. Instrum. Methods B 132 68
15. Gao K Y, Zhu H N and Liu B X 1998 Nucl. Instrum. Methods B 140 126