Ion flux, ion energy distribution and neutral density in an inductively coupled argon discharge

Plasma Sources Science and Technology

Volumn 9, Issue 4, 2000, Pages 568-573

  Chevolleau, T ^a   Fukarek, W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMIC PHYSICS; ELECTRIC DISCHARGES; IGNITION; IONIZATION; PLASMA COLLISION PROCESSES;

COUPLED ARGON DISCHARGES; ION ENERGY DISTRIBUTION;

PLASMA SOURCES;

EID: 0034321315     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/4/312     Document Type: Article

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