Carbon deposition by electron beam cracking of hydrocarbons on Ta2Zn3O8 thin film phosphors

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 6, 2000, Pages 2699-2705

  Kondoleon, Caroline A ^a   Rack, Philip ^b   Lambers, Eric ^a   Holloway, Paul ^a  

^a University of Florida   (United States)

^b ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CATHODOLUMINESCENCE; DEGRADATION; ELECTRON BEAMS; HYDROCARBONS; RAPID THERMAL ANNEALING; SPUTTER DEPOSITION; TANTALUM COMPOUNDS; VACUUM;

ELECTRON BEAM CRACKING; ELECTRON BOMBARDMENT; FIELD EMISSION DISPLAYS (FED);

THIN FILMS;

EID: 0034318828     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1319817     Document Type: Article

References (12)

1. L. Tannas, Jr., Flat Panel Displays asnd CRT's (Van Nostrand Reinhold, New York, 1985).
2. R. J. Langley, I. Puchades, S. K. Kurinec, and M. D. Potter, Proceedings of the Twelfth Biennial University/Government/Industry Microelectronics Symposium, Rochester, NY, 20-23 July 1997, pp. 161-4.
3. P. H. Holloway, T. A. Trottier, B. Abrams, C. Kondoleon, S. L. Jones, J. S. Sebastian, and W. J. Thomes, J. Vac. Sci. Technol. B 17, 758 (1999).
4. B. Chalamala, Y. Wei, and B. Grade, IEEE Spectr. 35, 42 (1998).
5. H. Swart, J. Sebastian, T. Trottier, S. Jones, and P. Holloway, J. Vac. Sci. Technol. 14, 1697 (1996).
6. R. J. Langley, G. F. Pettis, S. K. Kurinec, and M. D. Potter, Extended Abstracts of the Second International Conference on the Science and Technology of Display Phosphors, San Diego, CA, Nov. 1996.
7. P. D. Rack, M. D. Potter, S. Kurinec, W. Park, B. K. Wagner, and C. J. Summers, Proceedings of the Imaging Conference, Rochester, NY, April, 1999.
8. A. Pfahnl, Advances in Electron Tube Techniques (Pergamon, New York, 1961), p. 204.
9. C. H. Seager et al., J. Vac. Sci. Technol. A 17, 3509 (1999).
10. L. E. Davis, N. C. McDonald, P. W. Palmberg, and R. E. Weber, Handbook of Auger Electron Spectroscopy (Physical Electronic, Eden Prarie, MN, 1976).
11. J. P. Schaffer, A. Saxena, S. D. Antolovich, T. H. Sanders, Jr., and S. B. Warner, The Science and Design of Engineering Materials (WCB McGraw-Hill, Boston, MA, 1999).
12. C. H. Seager, D. R. Tallant, and W. L. Warren, J. Appl. Phys. 82, 4515 (1997).