Directed assembly of carbon nanotube electronic circuits by selective area chemical vapor deposition on prepatterned catalyst electrode structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3586-3589

  Wei, Y Y ^a   Fan, X ^a   Eres, Gyula ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; CARBON; CATALYSTS; CHEMICAL VAPOR DEPOSITION; ELECTRON BEAM LITHOGRAPHY; METALLIC FILMS; SILICA; SILICON WAFERS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CARBON NANOTUBE (CNT) ELECTRONIC CIRCUITS;

NANOTUBES;

EID: 0034317875     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1319709     Document Type: Article

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