Microstructure and phase development of buried resistors in low temperature co-fired ceramic

Journal of Electroceramics

Volumn 5, Issue 3, 2000, Pages 217-223

  Rodriguez, Mark A ^a   Yang, Pin ^a   Kotula, Paul ^a   Dimos, Duane ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; ENERGY DISPERSIVE SPECTROSCOPY; FIRING (OF MATERIALS); GRAIN SIZE AND SHAPE; PHASE TRANSITIONS; REACTION KINETICS; RESISTORS; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; VITRIFICATION; X RAY DIFFRACTION ANALYSIS;

BURRIED RESISTORS; DEVITRIFICATION; EMBEDDED RESISTOR CIRCUITS; LOW TEMPERATURE COBALT FIRED CERAMIC; PHASE DEVELOPMENT; RESISTOR INK;

CERAMIC MATERIALS;

EID: 0034316512     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026575428178     Document Type: Article

References (9)

1. T. Garino, M.A. Rodriguez, and D. Dimos, J. Amer. Ceram. Soc., (2000).
2. M.A. Rodriguez, P. Yang, P. Kotula, and D. Dimos, Adv. X-ray Anal., 43, 332 (2000).
3. G.M. Crosbie, F. Johnson, and W. Trela, J. Appl. Phys., 84, 2913 (1998).
4. B. Morten, A. Masoero, M. Prudenziati, and T. Manfredini, J. Phys. D: Appl. Phys., 27, 2227 (1994).
5. R.W. Vest, IEEE Trans. Compon. Hybrids ad Manufact. Technol., 14, 397 (1991).
6. J.R. Rellick and A.P. Ritter, Int. Conf. On High Density Packag. & MCMs., 1-5 (1999).
7. P. Yang, D. Dimos, M.A. Rodriguez, R.F. Huang, S. Dai, and D. Wilcox, "Direct-Write Percision Resistors for Ceramic Packages," in Materials Research Society Symposium Proceedings Vol. 542 (Ceramic Freeform and Layered Direct Fabrication, Materials Research Society, Pittsburgh, PA, 1999), pp. 159-164.
8. P. Yang, M.A. Rodriguez, P. Kotula, B.K. Miera, and D. Dimos, J. Appl. Phys., (2000).
9. G.E. Pike and C.H. Seager, J. Appl. Phys., 48, 5152 (1977).