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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 2714-2721

Characterization of the surface morphology and electronic properties of microwave enhanced chemical vapor deposited diamond films

(5) Fitzgerald, A G a Fan, Y a John, P b Troupe, C E b Wilson, J I R b

a UNIVERSITY OF DUNDEE (United Kingdom)

b HERIOT WATT UNIVERSITY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELECTRON TUNNELING; ELECTRONIC STRUCTURE; ION IMPLANTATION; NUCLEATION; PLASMA ETCHING; SCANNING TUNNELING MICROSCOPY; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC BONDING; SURFACE PROBE MICROSCOPY (SPM);

DIAMOND FILMS;

EID: 0034316455 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1326946 Document Type: Article

Times cited : (7)

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