Monte Carlo modeling of electron beam physical vapor deposition of yttrium

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 6, 2000, Pages 2937-2945

  Fan, Jing ^a   Boyd, Iain D ^a   Shelton, Chris ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b M Company   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; COMPUTER SIMULATION; ELECTRONIC STRUCTURE; MONTE CARLO METHODS; VAPOR DEPOSITION;

DIRECT SIMULATION MONTE CARLO (DSMC) METHODS; ELECTRON BEAM PHYSICAL VAPOR DEPOSITION (EBPVD);

YTTRIUM;

EID: 0034315434     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1310656     Document Type: Article

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