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Volumn 18, Issue 6, 2000, Pages 2937-2945
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Monte Carlo modeling of electron beam physical vapor deposition of yttrium
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION SPECTROSCOPY;
COMPUTER SIMULATION;
ELECTRONIC STRUCTURE;
MONTE CARLO METHODS;
VAPOR DEPOSITION;
DIRECT SIMULATION MONTE CARLO (DSMC) METHODS;
ELECTRON BEAM PHYSICAL VAPOR DEPOSITION (EBPVD);
YTTRIUM;
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EID: 0034315434
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1310656 Document Type: Article |
Times cited : (39)
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References (22)
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