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Volumn 18, Issue 6, 2000, Pages 2750-2756
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High performance micropane electron beam window
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Author keywords
[No Author keywords available]
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Indexed keywords
COOLING;
CURRENT DENSITY;
MELTING;
METAL FOIL;
SEMICONDUCTING SILICON;
THERMAL CONDUCTIVITY OF SOLIDS;
ELECTRON BEAM WINDOWS;
ELECTRON BEAM LITHOGRAPHY;
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EID: 0034315086
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1319694 Document Type: Article |
Times cited : (9)
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References (23)
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