Integrating statistical process monitoring with feedforward control

Quality and Reliability Engineering International

Volumn 16, Issue 6, 2000, Pages 515-525

  Montgomery, Douglas C ^a,d   Keats, J B ^a   Yatskievitch, Mark ^b   Messina, William S ^c  

^a ARIZONA STATE UNIVERSITY   (United States)

^b MOTOROLA INC   (United States)

^c Data Sleuths   (United States)

^d Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL APPLICATIONS; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL PROCESS CONTROL; SYSTEMS ENGINEERING;

CUMULATIVE SUM; ENGINEERING PROCESS CONTROL; FEEDFORWARD CONTROL; STATISTICAL PROCESS MONITORING;

PROCESS ENGINEERING;

EID: 0034313742     PISSN: 07488017     EISSN: None     Source Type: Journal    
DOI: 10.1002/1099-1638(200011/12)16:6<515::AID-QRE359>3.0.CO;2-I     Document Type: Article

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