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Volumn 122, Issue 4, 2000, Pages 771-775

Determination of kinetic energy distribution in a laser-ablated titanium plume by emission and laser-induced fluorescence spectroscopy

Author keywords

Ablation; Heat transfer; Laser; Thin films

Indexed keywords

FILM; HEAT TRANSFER; KINETICS; PLUME;

EID: 0034313275     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1318214     Document Type: Article
Times cited : (16)

References (9)
  • 2
  • 3
    • 36449007813 scopus 로고
    • Epitaxial growth of TiN films on (100) silicon substrates by laser physical vapor deposition
    • (1992) Appl. Phys. Lett , vol.61 , pp. 1290-1292
    • Narayan, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.