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Volumn 133-134, Issue , 2000, Pages 101-105

Effect of transverse current injection during vacuum arc deposition of TiN

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC CONTACTS; ELECTRIC CURRENTS; ELECTRON SCATTERING; ENERGY DISPERSIVE SPECTROSCOPY; MICROHARDNESS; PLASMA DENSITY; PLASMA FLOW; SCANNING ELECTRON MICROSCOPY; TITANIUM NITRIDE; TUNGSTEN CARBIDE; X RAY DIFFRACTION ANALYSIS;

EID: 0034310603     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00882-3     Document Type: Article
Times cited : (2)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.