Simulation modeling for 300 mm semiconductor factories

Solid State Technology

Volumn 43, Issue 10, 2000, Pages

  Campbell, Elizabeth ^a   Wright, Robert ^a   Cheatham, Joshua ^a   Schulz, Mathias ^a   Berry, James L ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FACTORY AUTOMATION; INVENTORY CONTROL; PRODUCTIVITY; SEMICONDUCTOR DEVICE MODELS; SILICON WAFERS;

AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS); LOGIC PROCESS FLOW;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034300356     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (5)