Synthesis of low-k porous silica films via freeze drying

Journal of Materials Science Letters

Volumn 19, Issue 20, 2000, Pages 1863-1866

  Hyun, S H ^a   Kim, T Y ^a   Kim, G S ^a   Park, H H ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AEROGELS; DRYING; MICROSTRUCTURE; PERMITTIVITY; POROUS MATERIALS; SYNTHESIS (CHEMICAL); THIN FILMS;

FREEZE DRYING; POROUS SILICA FILMS; SPIN COATING;

SILICA;

EID: 0034298180     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006775213914     Document Type: Article

References (6)

1. C. H. TING and T. E. SEIDEL, Mat. Res. Soc. Symp. Proc. 38 (1995) 3.
2. S. H. HYUN, J. J. KIM and H. H. PARK, J. Am. Ceram. Soc. 81, in press.
3. D. M. SMITH, R. DESHPANDE and C. J. BRINKER, Mat. Res. Soc. Symp. Proc. 271 (1992) 567.
4. S. S. PRAKASH, C. J. BRINKER and A. J. HURD, J. Non-Cryst. Solids 190 (1995) 264.
5. T. Y. KIM, M. E. Thesis, Yonsei University, Seoul, Korea 1 (1998).
6. G. W. SCHERER, J. Non-Cryst. Solids 155 (1993) 1.