Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2×1: Effects of hydrogenating-gas and thermal history

Surface Science

Volumn 465, Issue 1-2, 2000, Pages 177-185

  Nakazawa, Hideki ^a   Suemitsu, Maki ^a   Miyamoto, Nobuo ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b TOHOKU GAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIFFUSION IN SOLIDS; HYDROGENATION; MOLECULAR BEAM EPITAXY; REACTION KINETICS; SILANES; TEMPERATURE PROGRAMMED DESORPTION; THERMODYNAMICS;

SURFACE THERMODYNAMICS;

SEMICONDUCTING SILICON;

EID: 0034291481     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(00)00710-X     Document Type: Article

References (23)

1. Hirose F., Suemitsu M., Miyamoto N. Jpn. J. Appl. Phys. 29:1990;L1881.
2. Hirose F., Suemitsu M., Miyamoto N. Jpn. J. Appl. Phys. 28:1989;L2003.
3. Nakazawa H., Suemitsu M., Miyamoto N. Jpn. J. Appl. Phys. 36:1997;L703.
4. Sinniah K., Sherman M.G., Lewis L.B., Weinberg W.H., Yates J.T. Jr., Janda K.C. Phys. Rev. Lett. 62:1989;567.
5. Sinniah K., Sherman M.G., Lewis L.B., Weinberg W.H., Yates J.T. Jr., Janda K.C. J. Chem. Phys. 92:1990;5700.
6. Wise M.L., Koehler B.G., Gupta P., Coon P.A., George S.M. Surf. Sci. 258:1991;166.
7. Flowers M.C., Jonathan N.B.H., Liu Y., Morris A. J. Chem. Phys. 99:1993;7038.
8. Okada L.A., Wise M.L., George S.M. Appl. Surf. Sci. 82/83:1994;410.
9. D'Evelyn M.P., Yang Y.L., Sutcu L.F. J. Chem. Phys. 96:1992;852.
10. Wu C.J., Ionova I.V., Cater E.A. Surf. Sci. 295:1993;64.
11. Nachtigall P., Jordan K.D., Janda K.C. J. Chem. Phys. 95:1991;8652.
12. Shane S.F., Kolasinski K.W., Zare R.N. J. Vac. Sci. Technol. A. 10:1992;1.
13. Shane S.F., Kolasinski K.W., Zare R.N. J. Chem. Phys. 97:1992;1520.
14. Shane S.F., Kolasinski K.W., Zare R.N. J. Chem. Phys. 97:1992;3704.
15. Nachtigall P., Jordan K.D., Sosa C. J. Chem. Phys. 101:1994;8073.
16. Suemitsu M., Nakazawa H., Miyamoto N. Surf. Sci. 357/358:1996;555.
17. Nakazawa H., Suemitsu M. Appl. Surf. Sci. 130-132:1998;298.
18. Hoefer U., Li L., Heinz T.F. Phys. Rev. B. 45:1992;9485.
19. Nachtigall P., Jordan K.D. J. Chem. Phys. 102:1995;8249.
20. Spitzmller J., Fehrenbacher M., Pitter M., Rauscher H., Behm R.J. Phys. Rev. B. 55:1997;4659.
21. Widdra W., Yi S.I., Maboudian R., Briggs G.A.D., Weinberg W.H. Phys. Rev. Lett. 74:1995;2074.
22. Nakazawa H., Suemitsu M. Appl. Surf. Sci. 2000;. in press.
23. Wang Y., Bronikowski M.J., Hamers R.J. Surf. Sci. 311:1994;64.